| 84141000.10 |
Corrosion-resistent vaccum pumps (flow rate＞5m3/h, with contact surface being made of special corrosion-resistent materials) |
set/kilogram |
30% |
3 |
|
| 84141000.20 |
Vaccum pumps (intel≥38cm, speed≥15kl/s, vacuum extremity＜10-4torr) |
set/kilogram |
30% |
3 |
|
| 84141000.30 |
Vaccum pumps that can be used in UF6 atmosphere(made of aluminium, nickel or alloys with the content of nickel being more than 60% or used as a lining) |
set/kilogram |
30% |
3 |
|
| 84141000.40 |
Specially-designed or specially-made vaccum pumps with exhaust capacity≥5m3/min (used exclusively for diffusion and concentration of isotopic gases |
set/kilogram |
30% |
3 |
|
| 84141000.50 |
Vaccum pumps that can be used in UF6 atmosphere(UF6-resistent pumps can be sealed with fluorocarbon or special working fluid) |
set/kilogram |
30% |
3 |
|
| 84141000.60 |
The vaccum pumps,specifically or primarily used for Semiconductor wafer fabrication or flat panel screen manufacturing |
set/kilogram |
30% |
|
|
| 84141000.90 |
Other vacuum pumps |
set/kilogram |
30% |
|
|
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