| 84861010.00 |
Machines and apparatus for the treatment of monocrystalline sillicon by a process involving a change of temperature (used for the manufacture of boules or wafers) |
set/kilogram |
30% |
|
|
| 84861020.00 |
Grinding machines for the manufacture of boules or wafers |
set/kilogram |
30% |
|
|
| 84861030.00 |
Sawing machines for the manufacture of boules or wafers |
set/kilogram |
30% |
|
|
| 84861040.00 |
Chemical mechanical polishers(CMP) for the manufacture of boules or wafers |
set/kilogram |
30% |
|
|
| 84861090.00 |
Other machines and apparatus for the manufacture of boules or wafers |
set/kilogram |
30% |
|
|
| 84862010.00 |
Oxidation,diffusion,annealing and other heat treatment equipment for the manufacture of semiconductor devices or of electronic integrated circuis |
set/kilogram |
30% |
|
|
| 84862021.00 |
Chemical Vapour Deposition(CVD)equipment for the manufacture of semiconductor devices or of electronic integrated circuis |
set/kilogram |
30% |
|
|
| 84862022.00 |
Physical Vapour Deposition(PVD)equipment for the manufacture of semiconductor devices or of electronic integrated circuis |
set/kilogram |
30% |
|
|
| 84862029.00 |
Other film deposition equipment for the manufacture of semiconductor devices or of electronic integrated circuis |
set/kilogram |
30% |
|
|
| 84862031.10 |
Distributed repeat Stepper machine for manufacturing semiconductor devices or integrated circuits (for back track) |
set/kilogram |
100% |
|
|
| 84862031.20 |
Distributed repeat Stepper for manufacturing semiconductor devices or integrated circuits (I-line Stepper for front track) |
set/kilogram |
100% |
|
|
| 84862031.30 |
Distributed repeat Stepper for manufacturing semiconductor devices or integrated circuits (KrF Stepper for front track) |
set/kilogram |
100% |
|
|
| 84862031.90 |
Other distributed repetitive Stepper machines for manufacturing semiconductor devices or integrated circuits |
set/kilogram |
100% |
|
|
| 84862039.10 |
I-line Stepper for manufacturing semiconductor devices or integrated circuits (excluding step by step) |
set/kilogram |
100% |
|
|
| 84862039.20 |
KrF Stepper for manufacturing semiconductor devices or integrated circuits (except step by step) |
set/kilogram |
100% |
|
|
| 84862039.30 |
Argon fluoride (ArF) Stepper for manufacturing semiconductor devices or integrated circuits (excluding step by step) |
set/kilogram |
100% |
|
|
| 84862039.40 |
Argon fluoride immersion (ArFi) Stepper for manufacturing semiconductor devices or integrated circuits (except step by step) |
set/kilogram |
100% |
|
|
| 84862039.50 |
Extreme ultraviolet (EUV) Stepper for manufacturing semiconductor devices or integrated circuits (excluding step by step) |
set/kilogram |
100% |
|
|
| 84862039.90 |
Unlisted Stepper for manufacturing semiconductor devices or integrated circuits |
set/kilogram |
100% |
|
|
| 84862041.00 |
Dry plasma etching for the manufacture of semiconductor devices or of electronic integrated circuis |
set/kilogram |
30% |
|
|
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